Microelectronics processing : chemical engineering aspects / Dennis W. Hess, Klavs F. Jensen. - Washington, D.C. : American Chemical Society, 1989. - xiv, 547 p. : ill. ; 24 cm. - Advances in chemistry series, 0065-2393 ; 221 .

Includes bibliographical references and index.

0841214751


Integrated circuits--Design and construction.
Microelectronics--Materials.
Surface chemistry.

621.381 / MIC