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Polymers for microelectronics : resists and dielectrics / Larry F. Thompson, C. Grant Willson, Seuchi Tagawa, editors

Contributor(s): Thompson, Larry F | Willson, C. Grant | Tagawa, Seuchi | American Chemical Society. Division of Polymeric Materials : Science and Engineering | Society of Polymer Science (Japan) | American Chemical Society. Meeting (203rd : 1992 : San Francisco, Calif.).
Material type: materialTypeLabelBookSeries: ACS symposium series, ISSN 0097-6156; 537. Publisher: Washington, D.C. : American Chemical Society, c1994Description: xii, 571 p. : ill. ; 23 cm.ISBN: 0841227217.Call number: 621.381531 POL Subject(s): Microelectronics -- Materials -- Congresses | Polymers -- CongressesOnline resources: Click here to access online
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621.381531 POL (Browse shelf) 1 Available 1000002078

"Developed from a symposium sponsored by the Division of Polymeric Materials : Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, Calif., Apr. 5-10, 1992"

Includes bibliographical references and index

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