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Microelectronics processing : chemical engineering aspects / Dennis W. Hess, Klavs F. Jensen.

Contributor(s): Hess, Dennis W | Jensen, Klavs F.
Material type: materialTypeLabelBookSeries: Advances in chemistry series, 0065-2393 ; 221. Publisher: Washington, D.C. : American Chemical Society, 1989. Description: xiv, 547 p. : ill. ; 24 cm.ISBN: 0841214751.Call number: 621.381 MIC Subject(s): Integrated circuits -- Design and construction | Microelectronics -- Materials | Surface chemistryOnline resources: Click here to access online
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Includes bibliographical references and index.

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