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MEMS [electronic resource] :applications / edited by Mohamed Gad-el-Hak.

Contributor(s): Gad-el-Hak, Mohamed, 1945-.
Material type: materialTypeLabelComputer fileSeries: The MEMS handbook.Mechanical engineering series (Boca Raton, Fla.): Publisher: Boca Raton, FL : CRC Press/Taylor & Francis, 2006Edition: 2nd ed.Description: 568 p. : ill.ISBN: 9781420036558 (e-book : PDF); 9780849391392.Call number: 621.381 M533 Subject(s): Microelectromechanical systems | Detectors | Microactuators | RobotsGenre/Form: Electronic books.Online resources: Distributed by publisher. Purchase or institutional license may be required for access.
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English ebook

One of three parts whose previous edition was a published as a single volume.

Includes bibliographical references and index.

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