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Microlithography [electronic resource] :science and technology / edited by Kazuaki Suzuki, Bruce W. Smith.

Contributor(s): Suzuki, Kazuaki | Smith, Bruce W, 1959-.
Material type: materialTypeLabelComputer fileSeries: Optical science and engineering (Boca Raton, Fla.): 126.Publisher: Boca Raton : CRC Press, c2007Edition: 2nd ed.Description: 848 p. : ill.ISBN: 9781420051537 (e-book : PDF); 9780824790240.Call number: 621.381531 M626 Subject(s): Microlithography -- Industrial applications | Integrated circuits -- Masks | Metal oxide semiconductors, Complementary -- Design and construction | Manufacturing processesGenre/Form: Electronic books.Online resources: Distributed by publisher. Purchase or institutional license may be required for access.
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English ebook

Includes bibliographical references and index.

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