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Photonic MEMS devices [electronic resource] :design, fabrication and control / Ai-Qun Liu ... [et al.].

By: Liu, Ai-Qun.
Material type: materialTypeLabelComputer fileSeries: Optical science and engineering (Boca Raton, Fla.): Publisher: Boca Raton, Fla. : CRC Press, 2009Description: 483 p. : ill.ISBN: 9781420045710 (e-book : PDF); 9781420045680.Call number: 621.381 L783 Subject(s): Microelectromechanical systems | PhotonicsGenre/Form: Electronic books.Online resources: Distributed by publisher. Purchase or institutional license may be required for access.
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English ebook

Includes bibliographical references.

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