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VLSI fabrication principles : silicon and gallium arsenide / Sorab K. Ghandhi.

By: Ghandhi, Sorab Khushro.
Material type: materialTypeLabelBookPublisher: New York : John Wiley & Sons, c1983Description: ill. ; 24 cm.ISBN: 0471868337.Call number: 621.38171 GHA Subject(s): Silicon | Integrated circuits -- Very large scale integration | Gallium arsenideOnline resources: Click here to access online
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621.38171 GHA (Browse shelf) 1 Available 1000002106

"A Wiley-Interscience publication."

Includes bibliographical references and index.

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