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1. Chemical vapor deposition : principles and applications / edited by Michael L. Hitchman and Klavs F. Jensen

by Hitchman, Michael L | Jensen, Klavs F.

Call number: 671.735 CHE Material type: book Book; Format: print Publisher: London : Academic Press, c1993Online access: Click here to access online Availability: Items available for loan: BSTI [Call number: 671.735 CHE] (1).

2. Microelectronics processing : chemical engineering aspects / Dennis W. Hess, Klavs F. Jensen.

by Hess, Dennis W | Jensen, Klavs F.

Call number: 621.381 MIC Material type: book Book; Format: print Publisher: Washington, D.C. : American Chemical Society, 1989. Online access: Click here to access online Availability: Items available for loan: BSTI [Call number: 621.381 MIC] (1).